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Sheet-type automatic spin developing device

Sheet-type automatic spin developing device

Device dimensions: 2000W × 1200D × 2000H (200WCBT) / 2000W × 1500D × 2000H (300WCBT)

This is a sheet-type automatic spin developing device that sets the set in the loader, transports the substrate with a clean robot, and performs paddle development, rinsing, and spin drying. It can accommodate two chemical supply tanks or waste liquid tanks (20L) on the side of the main body.

  • Other semiconductor manufacturing equipment

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